Azoles
Water Reuse
Removal of Azoles from Semiconductor Wastewater
A leading IDM approached us to help remove azoles from their wastewater so they could reuse the water. This case study details what we achieved.
Semiconductor foundries and IDMs (integrated device manufacturers) are heavy users of water. Vast amounts of it are used for a variety of purposes from cleaning the wafer between processes to creating humidity in a clean room.
Re-use and reclamation of water is widely practised due to the high costs of cleaning the ultra pure water. Efficiencies are driven by treating the water just enough for the next process. It is common practice to reuse water in a part of the production process which needs less pure water than the first water use. For example, water that was used for rinsing can subsequently be used for cooling.
Jerome Budin
Wastewater consultant
Schedule a call with one of our wastewater treatment consultants at your convenience. Or you can send us an enquiry.
Foundries and IDMs are pushing for more and more water reuse to reduce costs and to improve the impact on the environment.
All fabs have a range of water treatment processes at various stages of the production line. The trouble is that if the existing water treatment processes cannot remove a pollutant then it needs to be disposed of offsite using incineration which is expensive and very bad for the environment.
This was the problem for one of our clients, who had azoles in the wastewater which were persistent after treatment.
Pharmaceutical company, US
A world leading IDM came to us because they had azoles in the water which their existing water treatment processes were unable to remove.
The client was having to use incineration to dispose of the hazardous water, which was not only very expensive, but also went against their environmental policy. Like many IDMs and foundries, they were trying to increase the water reuse of non-process water.
Tell us what organic compounds you need to remove from your water and our consultants will give their recommended approach which might involve:
The existing water treatment technologies did not remove the azoles to the right levels. It was clear that to remove the azoles from the water would take a different kind of water treatment.
Our Nyex-e system is designed to oxidise hazardous organic chemicals such as corrosion inhibitors or azoles. We implemented a lab test to confirm and the results spoke for themselves.
Using our Nyex-e water treatment process we exceeded the treatment target of >85% of Pyrazole from the water, achieving >99% removal. Energy consumption was c.a. 30 kWh/m3.
Specifically the treatment levels for all azoles tested were as follows:
5-Methyl-1h-Benzotriazole – greater than 99% removal
3 amino 1,2,4 Triazole – greater than 99% removal
Benzotriazole – 90% removal, down to 0.75 µg/L
Pyrazole by – greater than 99% removal
02.6.2023
Case study shows the successful removal of TOC up to 95% from battery wastewater to enable water reuse.
03.3.2023
Nyex was chosen over Ozone and Fenton due to reduced OpEx and lack of sludge.
03.30.2021
>99% reduction in phenol allowed safe discharge.
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